SVZ Technologies develops a system which allows for energy selection and separation of secondary electrons emitted from the material under test due to primary electron excitation in Scanning Electron Microscope.
This system is different from other commercially available secondary electron detectors due to its specific physical principle: while ordinary secondary electron detectors collect unselectively electrons of all emitted energies, the EDSES system selects emitted electrons by energy bands and transforms the resulting signal into a digital image of the sample under test.
The EDSES sensor head in the chamber of the SEM microscope:
SPECs:
| Secondary electron sensor | 100 mm2 | Secondary electron current sampling rate | 100 kS/s | |||||
| Grid bias range | up to 100 V | Minimum secondary electron current | 10 nA | |||||
| Resolution | 14 bits | |||||||
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New:
SVZ Technologies offers an upgraded version of the SVZ-EDSES-1 system. The SVZ-EDSES-2 upgrade includes an EDSES-2 system driver with new cables and an EDSES Rev2 data acquisition/conversion software.
The main advantages of the upgrade are:
1. Factor of 3 enhanced sampling rate.
2. Integrated bias modulation electronics.
3. Advanced parallel scanning mode.
4. Advanced data acquisition/conversion software, allowing faster data acquisition and more robust image processing.
SVZ Technologies has developed a new advanced sensor for the EDSES system (SU-EDSES). The option consists of the sensor, electronics unit, and supporting software.
